(Most have fundamental pre-requisites and high core expectations not shown here)
Joost Bonsen * jpbonsen@alum.mit.edu * Draft v011221
6.781 Submicrometer and
Nanometer Technology
()
Prereq.: Permission of instructor
Units: 3-0-9
Lecture:
TR9:30-11 (38-166)
Surveys techniques to fabricate and analyze submicron and nanometer structures,
with applications. Reviews optical and electron microscopy. Surface
characterization, preparation, and measurement techniques. Resist technology.
Optical projection, interferometric, X-ray, ion, and electron lithography.
Aqueous, ion, and plasma etching techniques. Lift-off and electroplating. Ion
implantation. Applications in microelectronics, microphotonics, information
storage, and nanotechnology. Undergraduates with permission of instructor.
H. I. Smith
2.373J Materials and
Processes for Microelectromechanical Devices and Systems (New)
()
(Same subject as 3.48J, 6.778J, 10.584J,
16.288J)
Prereq.: 6.152J/3.155J
or equivalent; permission of instructor
Units: 3-0-9
Lecture:
MW8:30-10 (3-370)
+final
Presents a unified treatment of the key principles in materials and processing
for the design and manufacture of microelectromechanical systems (MEMS).
Emphasis on materials and processes commonly used for fabrication for MEMS and
not microelectronic systems. Includes discussion of the processing and
properties of both thin and thick polycrystalline and amorphous films, wafer
and thin film bonding, bulk micromachining techniques, and the relationships
between processing and properties of active materials such as piezoelectrics,
ferroelectrics and phase-transition materials. Key material properties and
parameters and their relationships with microfabrication processes and
applications are discussed, including elastic and inelastic deformation,
fracture, residual stress, fatigue, creep, adhesion, stiction, and
coupled-field constitutive behavior. Materials and process selection and case
studies of applications provide a unifying theme.
L. Anand, K. F. Jensen, M. A. Schmidt, S. M. Spearing, C. V. Thompson
6.152J Microelectronics
Processing Technology
(,
)
(Same subject as 3.155J)
Prereq.: Permission of instructor
Units: 3-4-5
Lab:
TBA Lecture: MW2:30-4 (2-105)
Introduces the theory and technology of integrated-circuit fabrication. Lectures
and laboratory sessions on basic processing techniques such as diffusion,
oxidation, epitaxy, photolithography, chemical vapor deposition, and plasma
etching. Emphasis on the interrelationships between material properties, device
structure, and the electrical behavior of devices. Provides background for
thesis work in microelectronics or for 6.151. 6
Engineering Design Points.
M. A. Schmidt, L. A. Kolodziejski, L. C. Kimerling
6.777 Design and
Fabrication of Microelectromechanical Devices
()
Prereq.: 6.003,
8.02, 6.152J
or permission of instructor
Units: 4-0-8
URL: http://web.mit.edu/6.777/www/
Lecture:
WF11-12:30 (35-225)
Introduction to microelectromechanical devices (MEMS). Material properties,
microfabrication technologies, structural behavior, piezoresistive and
capacitive sensing, electrostatic actuation, fluid damping, noise, amplifiers,
and feedback systems. Student teams design microsystems (sensors, electronics,
and feedback) to meet a set of specifications (sensitivity, frequency response,
linearity) using a realistic microfabrication process. Emphasis on modeling and
simulation in the design process. 4 Engineering Design Points.
S. D. Senturia, M. A. Schmidt
2.095 Mechanics of
Materials: Molecular Theory and Simulation
()
Prereq.: 2.002,
2.006,
or permission of instructor
Units: 3-0-9
Molecular theory and simulation of the mechanics of materials with emphasis on
fluids. Equal emphasis on theory and simulation. Dilute gases and the Boltzmann
equation. Kinetic theory of gases and the direct simulation Monte Carlo. Hard
sphere molecular dynamics. Molecular dynamics and Monte Carlo methods for dense
fluids and solids. Survey of state-of-the-art applications, including flows at
the microscale (MEMS), highly non-equilibrium flows, polymeric fluids, phase
transitions, and crack propagation.
N. Hadjiconstantinou
2.131 Advanced
Instrumentation and Measurement
()
Prereq.: Permission of instructor; restricted to 10 students
Units: 3-6-3
Laboratory/computer-based subject intended to provide training in system-level
design, fabrication, and evaluation, with a particular emphasis on systems
involving concepts and technology from mechanics, optics, electronics,
chemistry, and biology. Extensive use of simulation, modeling, and design
software. Students learn the use of the various design, analysis, modeling,
fabrication, and test and measurement tools in the context of building a force
reflecting teleoperated nano-robot system having atomic resolution positioning
capabilities. Subject is self-paced and makes extensive use of notebook
computers which are provided to each student. No final exam.
I. W. Hunter
5.76 Modern Topics in
Physical Chemistry
()
Prereq.: 5.61
or 5.73
or 8.05
Units: 3-0-9
Surveys modern research topics in physical chemistry. Introduction to four or
five research areas of current interest. Topics vary from year to year and may
include the following: advanced statistical and quantum mechanics, molecular dynamics,
nanostructures and mesoscopic materials, high resolution and ultra fast laser
spectroscopy, atmospheric, environmental and surface science, and magnetic
resonance.
R. G. Griffin, Staff
10.520 Molecular Aspects
of Chemical Engineering
()
(Subject meets with 10.420)
Prereq.: 5.13,
10.213,
or equivalent
Units: 3-0-6
Molecular-level engineering and analysis of chemical processes. Use of chemical
bonding, reactivity, and other key concepts in the design and tailoring of
organic systems. Application and development of structure-property
relationships. Descriptions of the chemical forces and structural factors that
govern supramolecular and interfacial phenomena for molecular and polymeric
systems.
P. E. Laibinis, P. T. Hammond
10.522 Nanostructured
Catalysts Design and Organic Synthesis (New)
(,
)
Prereq.: Permission of instructor
Units: 3-0-6
Lecture:
MW EVE (6:30-8:30 PM) (8-404)
Catalytic processes are critical to the synthesis of chemicals, materials, and
pharmaceuticals. Subject describes the tailoring of materials with unique pore
structures and nanocrystallinity to provide for designed functionalities in
catalytic applications. Strategies for surface modifications and compositional
design targeted towards enhancing catalytic activity, selectivity, and
stability are discussed. The charaterization and use of nanostructured
catalysts in organic synthesis are presented; the synthetic transformations and
catalytic chemistry underlying oxidation/reduction, hydrogenation, acid
catalysis, polymerization, and asymmetric synthesis of fine chemicals and
pharmaceuticals.
J. Y. Ying
10.920 Indepartmental
Seminar in Nanostructured Materials
()
Prereq.: Permission of instructor
Units: 2-0-4 [P/D/F]
Research seminars on the synthesis, structural characterization, and
application of nanostructured materials. Presentations by faculty and students
from Departments of Chemical Engineering, Chemistry, Electrical Engineering and
Computer Science, and Materials Science and Engineering engaging in studies of
nanocrystallites, clusters, thin films, and quantum dots. Open to students
interested in an interdisciplinary approach to ultrafine materials processing.
J. Y. Ying
2.75 Precision Machine
Design
()
Prereq.: 2.72
or permission of instructor
Units: 3-0-9
Intensive coverage of precision engineering theory, heuristics, and
applications pertaining to the design of systems ranging from consumer products
to machine tools. Topics covered include: economics, project management, and
design philosophy; principles of accuracy, repeatability, and resolution; error
budgeting; sensors; sensor mounting; systems design; bearings; actuators and
transmissions; system integration driven by functional requirements and
operating physics. Emphasis on developing creative designs which are optimized
by analytical techniques applied via spreadsheets. Many real-world examples are
given, and classwork and tests are based on mini-design problems.
A. Slocum, S. Nayfeh
MAS.962 Silicon Biology
Prereq.: Permission of
instructor
Units: 3-0-6 [P/D/F]
http://courses.media.mit.edu/mas962/
This course explores recent developments at the interface of
nanotechnology, surface chemistry, and biology. The course begins with
introductory lectures on silicon fabrication, chemistry, and molecular biology
and continues with a series of in-depth lectures on field-effect devices,
solid-liquid interfaces, techniques for surface analysis and modification,
nanopore characterization of biopolymers, and protein microarrays. The final
section of the class will focus on using biology to build molecular machines,
molecular assemblers, and computers.
Scott Manalis, Joseph Jacobson, and Shuguang Zhang
3.11 Mechanics of
Materials
()
Prereq.: 8.01,
18.03
Units: 4-0-8
Overview of mechanical properties of ceramics, metals, and polymers,
emphasizing the role of processing and microstructure in controlling these
properties. Basic topics in mechanics of materials including: continuum stress
and strain, truss forces, torsion of a circular shaft and beam bending. Design
of engineering structures from a materials point of view.
C. Ortiz, L. J. Gibson
3.052 Nanomechanics of
Materials and Biomaterials
()
Prereq.: 3.11
or permission of instructor
Units: 3-0-9
Lecture:
TR12 (2-131) Recitation:
F2 (2-131) +final
Subject focuses on the latest scientific developments and discoveries in the
field of nanomechanics, i.e. the deformation of extremely tiny (10-9 meters)
areas of synthetic and biological materials. Lectures include a description of
normal and lateral forces at the atomic scale, atomistic aspects of adhesion,
nanoindentation, molecular details of fracture, chemical force microscopy,
elasticity of individual macromolecular chains, intermolecular interactions in
polymers, dynamic force spectroscopy, biomolecular bond strength measurements,
and molecular motors.
C. Ortiz
6.892/7.90 Computational
Functional Genomics
Preq: 7.28 or permission of instructor
G(Spring)
David Gifford, Richard Young
TR 2:30-4:00 in 37-212
Study and discussion of computational approaches
and algorithms for
contemporary problems in functional genomics. Topics include DNA chip
design, experimental data normalization, expression
data representation
standards, proteomics, gene clustering,
self-organizing maps, Booolean
networks, statistical graph models, Bayesian
network models, continuous
dynamic models, statistical metrics for model
validation, model
elaboration, experiment planning, and the
computational complexity of
functional genomics
problems.